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发明名称
摘要
申请公布号
JP2775452(B2)
申请公布日期
1998.07.16
申请号
JP19890013092
申请日期
1989.01.24
申请人
SHINDENGEN KOGYO KK;HIGASHINE SHINDENGEN KK
发明人
ENDO MASAHIRO
分类号
H01L29/73;G05F1/613;H01L21/331;H01L21/8222;H01L27/06;H01L29/732;(IPC1-7):H01L21/822
主分类号
H01L29/73
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代理人
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