Methode und Vorrichtung zur Bestimmung der interstitiellen Sauerstoffkonzentration in monokristallinem Silizium,申请号DE1993616434T-传众专利搜索

发明名称	Methode und Vorrichtung zur Bestimmung der interstitiellen Sauerstoffkonzentration in monokristallinem Silizium
摘要	A method and apparatus disclosed by this invention allows determination of the interstitial oxygen concentration in a silicon single crystal to be effected stably and accurately without being appreciably affected by change of the temperature of a sample under test. The interstitial oxygen concentration in the silicon single crystal is determined on the basis of the value of : <MATH> or the value of : <MATH> (wherein a or b stands for a parameter whose value depends on the conditions for determination or the apparatus for determination and should be empirically fixed with respect to specific conditions of determination or the apparatus used therefor) concerning an interstitial oxygen absorption peak at 1106 cm<-><1> obtained by means of an infrared spectrophotometer. The accuracy of the determination is enhanced by providing a sample stage in the infrared spectrophotometer with temperature adjusting means and effecting the measurement of an infrared absorption at 1106 cm<-><1> in the state having the temperature of the sample stage and the temperature of the sample fixed thereto maintained at a constant level. The interstitial oxygen absorption peak is obtained in a state having the sample chamber of the infrared spectrophotometer completely separated from the part accommodating the light source and other devices as with an optical window member so as to allow the temperature of the sample to remain stably during the course of determination. Automatic determination of the interstitial oxygen concentration is attained by means of a comprehensive computerized control system incorporating the automatic measurement of sample thickness and automatic sample conveyance.
申请公布号	DE69316434(T2)	申请公布日期	1998.07.16
申请号	DE1993616434T	申请日期	1993.03.30
申请人	SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP	发明人	KITAGAWARA, YUTAKA, TAKASAKI-SHI, GUNMA-KEN, JP;KUBOTA, HIROSHI, ANNAKA-SHI, GUNMA-KEN, JP;TAMATSUKA, MASARO, ANNAKA-SHI, GUNMA-KEN, JP;TAKENAKA, TAKAO, ANNAKA-SHI, GUNMA-KEN, JP;TAKAMIZAWA, KAZUHISA, NISHISHIRAKAWA-GUN, FUKUSHIMA-KEN, JP
分类号	C30B33/00;G01N21/35;(IPC1-7):G01N21/35	主分类号	C30B33/00
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