发明名称 |
Vakuum-Beschichtungsanlage |
摘要 |
The invention relates to a vacuum coating system comprising, inside a coating chamber (1), a coating source (3) opposite which a table (21) with a substrate (4) is mounted as a substrate support. A mask is placed between the substrate (4) and the coating source (3). Upstream of the coating source (3) the system is fitted with a secondary chamber (7) and a reserve roller (11) and, downstream of said coating source (3), in a secondary chamber (8), with a winding roller (12). A mask (5) is placed in several points of the flexible strip (11), leading from the reserve roller (11) to the winding roller (12).
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申请公布号 |
DE19700408(A1) |
申请公布日期 |
1998.07.16 |
申请号 |
DE19971000408 |
申请日期 |
1997.01.09 |
申请人 |
BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450 HANAU, DE |
发明人 |
SAUNDERS, MARK, DIPL.-ING., 63755 ALZENAU, DE;OCKER, BERTHOLD, DIPL.-PHYS., 63454 HANAU, DE |
分类号 |
B01J3/00;C23C14/04;C23C14/56;C23C16/54;(IPC1-7):C23C14/22;C23C14/34 |
主分类号 |
B01J3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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