发明名称 Vakuum-Beschichtungsanlage
摘要 The invention relates to a vacuum coating system comprising, inside a coating chamber (1), a coating source (3) opposite which a table (21) with a substrate (4) is mounted as a substrate support. A mask is placed between the substrate (4) and the coating source (3). Upstream of the coating source (3) the system is fitted with a secondary chamber (7) and a reserve roller (11) and, downstream of said coating source (3), in a secondary chamber (8), with a winding roller (12). A mask (5) is placed in several points of the flexible strip (11), leading from the reserve roller (11) to the winding roller (12).
申请公布号 DE19700408(A1) 申请公布日期 1998.07.16
申请号 DE19971000408 申请日期 1997.01.09
申请人 BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450 HANAU, DE 发明人 SAUNDERS, MARK, DIPL.-ING., 63755 ALZENAU, DE;OCKER, BERTHOLD, DIPL.-PHYS., 63454 HANAU, DE
分类号 B01J3/00;C23C14/04;C23C14/56;C23C16/54;(IPC1-7):C23C14/22;C23C14/34 主分类号 B01J3/00
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