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发明名称
VERTICAL HEAT-TREATMENT APPARATUS HAVING A WAFER TRANSFER MECHANISM
摘要
申请公布号
KR0141474(B1)
申请公布日期
1998.07.15
申请号
KR19900010707
申请日期
1990.07.14
申请人
TOKYO ELECTRON CO.,LTD
发明人
ASANO, TAKANOBU;KITAYAMA, HIROFUMI;IWAI, HIROYUKI
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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