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发明名称
Improved thin film varactors
摘要
申请公布号
EP0430697(B1)
申请公布日期
1998.07.15
申请号
EP19900313018
申请日期
1990.11.30
申请人
XEROX CORPORATION
发明人
CHIANG, ANNE;HUANG, TIAO-YUAN;ELROD, SCOTT A.;OKI, TAKAMASA JOHN;HADIMIOGLU, BABUR;WU, I-WEI
分类号
H01L21/822;H01L27/04;H01L29/93;H01L29/94;(IPC1-7):H01L29/93
主分类号
H01L21/822
代理机构
代理人
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