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发明名称
SLANT ETCHING METHOD OF METAL LAYER
摘要
申请公布号
KR0141965(B1)
申请公布日期
1998.07.15
申请号
KR19890003677
申请日期
1989.03.23
申请人
GOLDSTAR ELECTRON CO.,LTD
发明人
KIM, IN-GI
分类号
H01L21/465;(IPC1-7):H01L21/465
主分类号
H01L21/465
代理机构
代理人
主权项
地址
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