Method and apparatus for detecting defects in wafers

摘要

A method for detecting electrical defects in a semiconductor wafer. includes the steps of: a) applying charge to the wafer such that electrically isolated structures are raised to a voltage relative to electrically grounded structures; b) obtaining voltage contrast data for at least a portion of the wafer containing such structures using an electron beam; and c) analyzing the voltage contrast data to detect structures at a voltages different to predetermined voltages for such structures. Voltage contrast data can take one of a number of forms. In a simple form. data for a number of positions on a line scan of an electron beam can be taken and displayed or stored as a series of voltage levels and scan positions. Alternatively. the data from a series of scans can he displayed as a voltage contrast image. Analysis can be achieved by comparison of one set of voltage contrast data. for example voltage contrast data from one die on a wafer. with one or more other such sets. for example voltage contrast data for corresponding structures on one or more preceding dice. so as to determine differences therebetween.