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经营范围
发明名称
Amine-containing alicyclic photoresist copolymer
摘要
申请公布号
GB2321060(A)
申请公布日期
1998.07.15
申请号
GB19980000194
申请日期
1998.01.06
申请人
* HYUNDAI ELECTRONICS INDUSTRIES CO., LTD.
发明人
JAE CHANG * JUNG;CHI HYEONG * ROH;JOO ON * PARK
分类号
G03F7/027;C08F2/48;C08F226/02;C08F232/00;G03F7/004;G03F7/039;H01L21/027;(IPC1-7):C08F232/08;G03F7/038
主分类号
G03F7/027
代理机构
代理人
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地址
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