发明名称 |
METHOD AND EQUIPMENT FOR GROWING SINGLE CRYSTALS |
摘要 |
A method and apparatus for growing and manufacturing a single crystal according to a so-called Czochralski (CZ) method. A seed crystal 12 is connected to a tip end of a wire 41a as a hanging member 41 to pull and form a single crystal part 15, arm-shaped members 44a of a lifting jig 44 are engaged in a recess 16 of a corrugated portion 14 formed on the single crystal part 15 during the pulling operation, the pulling speeds of both of the arm-shaped members 44a and wire 41a are synchronously controlled to provide smooth transfer between the arm-shaped members 44a and wire 41a, whereby the single crystal part 15 is pulled always at a constant pulling speed. In particular, a heavy-weight single crystal can be safely pulled and formed without any dislocation therein while minimizing an impact force applied to the crystal. <IMAGE> |
申请公布号 |
EP0826796(A4) |
申请公布日期 |
1998.07.15 |
申请号 |
EP19960910223 |
申请日期 |
1996.04.22 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD. |
发明人 |
IINO, EIICHI;NAKAMURA, YASUSHI;OTSUKA, SEIICHIRO;MIDZUISHI, KOJI;KIMURA, MASANORI;YAMAGISHI, HIROTOSHI |
分类号 |
C30B15/20;C30B15/22;C30B15/30;C30B29/06 |
主分类号 |
C30B15/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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