发明名称 |
PROCESS FOR DEPOSITION OF DIAMONDLIKE, ELECTRICALLY CONDUCTIVE AND ELECTRON-EMISSIVE CARBON-BASED FILMS |
摘要 |
A process for depositing amorphous or nanophase diamondlike carbon (DLC) and a-C:H carbon/hydrogen films with variable and controllable properties on the surface of a substrate is disclosed. The process utilizes a combined hydrocarbon ion beam and plasma-activated hydrocarbon gaseous radical flux produced by an end-Hall ion source to yield a film with good electron-emissivity characteristics or high hardness and good optical transparency, as desired. A second ion source providing a beam of argon ions above or together in nitrogen is optionally directed at the substrate for cleaning prior to deposition and for ion-assisted deposition during deposition or for doping. |
申请公布号 |
EP0737258(A4) |
申请公布日期 |
1998.07.15 |
申请号 |
EP19950906660 |
申请日期 |
1994.12.19 |
申请人 |
COMMONWEALTH SCIENTIFIC CORPORATION |
发明人 |
BALDWIN, DAVID A.;MICHEL, STEPHEN L. |
分类号 |
C30B25/02;C23C16/02;C23C16/26;C23C16/513;C30B25/10;C30B29/04 |
主分类号 |
C30B25/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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