| 发明名称 |
Electromechanical transducer |
| 摘要 |
PCT No. PCT/EP95/03052 Sec. 371 Date Mar. 5, 1997 Sec. 102(e) Date Mar. 5, 1997 PCT Filed Sep. 12, 1994 PCT Pub. No. WO96/08701 PCT Pub. Date Mar. 21, 1996A field effect transistor and a piezoelectric sensor are positioned between layers of silicon and aluminum to function as a bimetallic electromechanical transducer. The transducer can be used in atomic force microscopy or as an actuator, a chemical sensor, or an oscillator.
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| 申请公布号 |
US5780727(A) |
申请公布日期 |
1998.07.14 |
| 申请号 |
US19970793788 |
申请日期 |
1997.03.05 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GIMZEWSKI, JAMES K.;SCHLITTLER, RAETO R.;WELLAND, MARK E. |
| 分类号 |
G01B21/30;G01D5/12;G01H1/00;G01H11/06;G01K5/72;G01L1/16;G01L9/00;G01N37/00;G01Q20/04;G01Q60/38;H01L29/786;H01L41/08;H01L41/09;H04R17/00;(IPC1-7):G01H11/06 |
主分类号 |
G01B21/30 |
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