发明名称 |
Polymers containing protected styrene and unprotected hydroxybenzyl (meth)acrylamides |
摘要 |
Novel polymers may be used in resist formulations for the fabrication of printing plates and circuit boards and, in particular, for the fabrication of integrated circuits. No autocatalytic decomposition of the compounds occurs and the resist film obtained therewith has good adhesive properties.
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申请公布号 |
US5780566(A) |
申请公布日期 |
1998.07.14 |
申请号 |
US19950548421 |
申请日期 |
1995.10.26 |
申请人 |
OLIN MICROELECTRONIC CHEMICALS, INC. |
发明人 |
MERTESDORF, CARL-LORENZ |
分类号 |
G03F7/039;C08F12/00;C08F212/14;C08F220/58;G03F7/004;H01L21/027;(IPC1-7):C08F20/60 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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