| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately and inexpensively constitute an automatic analyzer by disposing a number of micropumps, mixing chambers and reaction grooves on a wafer. SOLUTION: Each micropump 1 provided on the silicon wafer 2 of approximately 500μm thick acts on a fluid sample 1 supplied through grooves 3 from an flow inlet 4 by curvature of a piezoelectric element caused by application voltage or the volume flow of a reagent, and a vortex flow is produced in the sample and the reagent introduced in a mixing chamber 5 to mix them. A product mixed in the mixing chamber 5 is transmitted to an evaluation sensor 9 while being reacted in a reaction groove, and property of fluid is evaluated. Another micropump 11, a flow inlet 35 and a flow outlet 36 are provided on the wafer 2, and liquid is supplied to peripheral systems. When the silicon wafer 2 is used, a number of the micropumps 1, the mixing chambers 5 and various analysis evaluation sensors 9 can be disposed, and cost can be reduced. |
