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发明名称
COOLING APPARATUS FOR VACUUM CHAMBER
摘要
申请公布号
US3566960(A)
申请公布日期
1971.03.02
申请号
USD3566960
申请日期
1969.08.18
申请人
ROBLEY V. STUART
发明人
ROBLEY V. STUART
分类号
C23C14/54;H01J7/24;H01J37/34;(IPC1-7):F28D15/00
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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