| 发明名称 |
Active matrix display device using aluminum alloy in scanning signal line or video signal line |
| 摘要 |
An anodized oxide film of Al is formed on a scanning signal line and a gate electrode. Al-Ta is used as material of each of the scanning signal line and gate electrode. The thickness of the anodized oxide film is set to 1,000 angstroms or more. The fabrication yield and reliability can be improved.
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| 申请公布号 |
US5781255(A) |
申请公布日期 |
1998.07.14 |
| 申请号 |
US19960725256 |
申请日期 |
1996.10.04 |
| 申请人 |
HITACHI, LTD. |
发明人 |
YAMAMOTO, HIDEAKI;MATSUMARU, HARUO;SUZUKI, TETSUAKI;NAKATANI, MITSUO;TSUKII, MICHIO;SASANO, AKIRA;OIKAWA, SABURO;ORITSUKI, RYOJI |
| 分类号 |
G02F1/133;G02F1/1333;G02F1/1343;G02F1/136;G02F1/1362;G02F1/1368;H01L21/336;H01L27/12;H01L29/78;H01L29/786;(IPC1-7):G02F1/136;G02F1/134 |
主分类号 |
G02F1/133 |
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