| 摘要 |
PROBLEM TO BE SOLVED: To automatically correct all six displacement components of a linearly moving body by using a unit consisting of a photodetector which detects the displacement of light to a correction reference laser beam and a servo circuit of a displacement correction device. SOLUTION: The sensors Sθ1 and Sθ2 are provided on a flat plate 7 along the passing position of a correction reference laser beamαtogether with the sensors Sz1 and Sz2 placed along the passing position of a correction reference laser beamβrespectively. A moving stage 2 contains the vertical component displacement correction devices Az1 to Az2 in a plane rectangular to the pitching, rolling and moving directions of the stage, the horizontal component displacement correction devices Aθ1 and Aθ2 in a plane rectangular to the yawing and moving directions of the stage and a displacement correction device Ax1 prepared against the moving direction of the stage respectively. Then, a sensor Sx1 is connected to the device Ax1 via a servo circuit. In such a constitution, all six displacement components of a linearly moving body can be easily and automatically corrected even for a large-size ultraprecise positioning device.
|
