发明名称 PHOTOSENSITIVE COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide the positive photosensitive composition capable of forming a high-contrast image without lowering sensitivity and free from blurring due to printing and safety against white light and wide in development latitude. SOLUTION: This photosensitive compositor contains a polymer compound comprising repeating units derived from at least (1) a monomer capable of additional polymerization having a fluorinated aliphatic group substituted by a fluorine atom for a hydrogen atom; (2) an acrylate or methacrylate or acrilamide or methacrilamide having a >=9 C aliphatic group or an aryl group substituted by a >=2 C aliphatic group; and (3) a monomer having a phenolic hydroxyl group represented by formulae I-III in which A is an H or halogen atom or an 1-4 C alkyl group; R1 is an H atom or a 1-20 C alkyl or 5-20 C aryl group; each of Y and Z is, independently, a 6-20 arylene group; X is a divalent organic bonding group comprising an atom or atoms selected from C, N, O, S, halogen, or H; (m) is 0 or 1; and (n) is 1, 2, or 3.
申请公布号 JPH10186642(A) 申请公布日期 1998.07.14
申请号 JP19960348526 申请日期 1996.12.26
申请人 FUJI PHOTO FILM CO LTD 发明人 KAWAMURA KOICHI;WATANABE NORIAKI
分类号 G03F7/004;G03F7/00;G03F7/022;G03F7/039;H01L21/027;(IPC1-7):G03F7/004 主分类号 G03F7/004
代理机构 代理人
主权项
地址