发明名称 |
Scanning electron microscope |
摘要 |
A stage on which a sample is placed is driven through feed screws rotated by pulse motors which are controlled by a micro-step drive control method. Backlash quantities and feed screw pitch errors have previously been obtained and stored in a memory, and when the stage is to be driven, a stage controller corrects the backlash and pitch errors.
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申请公布号 |
US5780853(A) |
申请公布日期 |
1998.07.14 |
申请号 |
US19960749214 |
申请日期 |
1996.11.14 |
申请人 |
NIKON CORPORATION |
发明人 |
MORI, FUTOSHI;FUKAZAWA, KAZUHIKO;HIROSE, HIROSHI;KOHAMA, YOSHIAKI |
分类号 |
H01J37/20;(IPC1-7):H01J37/20 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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