| 发明名称 |
DEVICE AND METHOD FOR DETECTING LEAKAGE OF FILTER FILM |
| 摘要 |
A device for detecting leakage of a filter film, including a means for supplying a gas to one of spaces partitioned by a filter film, a means for sensing the quantity of gas leaked into the other space, and a means for preventing the gas detecting means from being influenced by the gas leaked.
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| 申请公布号 |
WO9829184(A1) |
申请公布日期 |
1998.07.09 |
| 申请号 |
WO1997JP04828 |
申请日期 |
1997.12.25 |
| 申请人 |
ASAHI KASEI KOGYO KABUSHIKI KAISHA;FUKADA, SEIJI;ITOSE, TAKAO |
发明人 |
FUKADA, SEIJI;ITOSE, TAKAO |
| 分类号 |
B01D65/10;G01N15/08;(IPC1-7):B01D65/10 |
主分类号 |
B01D65/10 |
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