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发明名称
SOI-BiCMOS Fabrication
摘要
申请公布号
EP0740335(A3)
申请公布日期
1998.07.08
申请号
EP19960106260
申请日期
1996.04.19
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
KERBER, MARTIN, DR.
分类号
H01L21/02;H01L21/331;H01L21/8222;H01L21/8228;H01L21/8238;H01L21/8248;H01L21/8249;H01L21/84;H01L27/06;H01L27/082;H01L27/092;H01L27/12;H01L29/73;H01L29/732;(IPC1-7):H01L21/331;H01L21/824
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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