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发明名称
PARTICLE BEAM OPTIC REPRODUCTION SYSTEM
摘要
申请公布号
EP0739531(B1)
申请公布日期
1998.07.08
申请号
EP19950904959
申请日期
1995.01.12
申请人
IMS IONEN MIKROFABRIKATIONS SYSTEME GESELLSCHAFT M.B.H.
发明人
STENGL, GERHARD;CHALUPKA, ALFRED;VONACH, HERBERT
分类号
H01J37/12;H01J37/30;H01J37/305;H01L21/027;(IPC1-7):H01J37/30
主分类号
H01J37/12
代理机构
代理人
主权项
地址
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