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发明名称
Wafer-level burn-in system
摘要
申请公布号
EP0841572(A3)
申请公布日期
1998.07.08
申请号
EP19970308888
申请日期
1997.11.05
申请人
W.L. GORE & ASSOCIATES, INC.
发明人
BUDNAITIS, JOHN J.;LEONG, JIMMY
分类号
G01R31/26;G01R1/067;G01R1/073;G01R3/00;G01R31/28;H01L21/326;H01L21/66;(IPC1-7):G01R31/316
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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