发明名称 A single crystal pulling apparatus
摘要 <p>A single crystal pulling apparatus of Czochralski technique type including (i) a cylindrical partition adapted to divide the surface portion of the melt into an inner part and an outer part, the former being where the single crystal is grown and the latter being where granular polycrystal material is supplied, (ii) a flat ring having heat reflecting and insulating property held horizontally above the melt, and (iii) a vertically shiftable purge tube suspended centrally into the heating chamber adapted to enter into the inner hole of the flat ring. <IMAGE></p>
申请公布号 EP0555040(B1) 申请公布日期 1998.07.08
申请号 EP19930300735 申请日期 1993.02.02
申请人 SHIN-ETSU HANDOTAI COMPANY LIMITED 发明人 TAKANO, KIYOTAKA;FUSEGAWA, IZUMI;YAMAGISHI, HIROTOSHI
分类号 C30B15/02;C30B15/00;C30B15/14;C30B27/02;H01L21/208;(IPC1-7):C30B15/00 主分类号 C30B15/02
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