| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for minute molding of ceramics wherein minute features are duplicated with high resolution. SOLUTION: A method for minute molding of a ceramic element comprises a process wherein a master mold containing minute features in the range of 0.1-1000μm in dimensions is obtained by subjecting a silicon wafer to etching, a process wherein a female master mold is formed of a material enabling duplication of the minute features, by using the master mold, a process wherein this female master mold is fitted to a die, a process wherein a ceramic powder of which the average particle size is in the range of 0.01-0.3μm is charged in this die, a process wherein an unprocessed base element is formed by compression-molding the ceramic powder and a process wherein this unprocessed base element is sintered.
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