发明名称 |
C4 Pb/Sn evaporation process |
摘要 |
A process of Pb/Sn evaporation eliminates haloes in the manufacture of solder bump interconnects. This robust process of forms solder bump interconnects and reduces critical molebdnum mask sensitivity. Vacuum evaporation through which Pb/Sn C4 pads are deposited is performed by maintaining parallel temperature gradients between the molybdenum mask and silicon wafer, thus resulting in elimination of connecting haloes and yield losses.
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申请公布号 |
US5776790(A) |
申请公布日期 |
1998.07.07 |
申请号 |
US19960608162 |
申请日期 |
1996.02.28 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
STARR, STEPHEN GEORGE;KUTT, JOHN CONRAD;ZALOKAR, JR., ROBERT HENRY |
分类号 |
C23C14/04;C23C14/54;H01L21/60;(IPC1-7):H01L21/285 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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