发明名称 In-situ fabrication of a superconductor hetero-epitaxial Josephson junction
摘要 A method of in-situ fabrication of a Josephson junction having a laminar structure, the method comprising the steps of: (1) etching a planar substrate to yield a first planar segment, a second planar segment and a ramp segment, the ramp segment connecting the two planar segments at an angle thereto and the substrate having a constantly-decreasing thickness in the ramp segment; (2) depositing a first superconductive layer on the substrate; (3) depositing a non-superconductive layer on the first superconductive layer; and (4) depositing a second superconductive layer on the non-superconductive layer, wherein both the first and second superconductive layers, and the non-superconductive layer are epitaxial with a c-axis in a direction substantially normal to the plane of the first and second planar segments, and the layers are of substantially uniform thickness in the three segments.
申请公布号 US5776863(A) 申请公布日期 1998.07.07
申请号 US19960676793 申请日期 1996.07.08
申请人 TRW INC. 发明人 SILVER, ARNOLD H.
分类号 H01L39/22;H01L39/24;(IPC1-7):H01L39/24 主分类号 H01L39/22
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