| 摘要 |
A method of deciding temperature control parameters of a heat treatment instrument for performing a heat treatment on a target object by increasing a temperature of a heat furnace of the heat treatment instrument, in accordance with the temperature control parameters initialized, obtaining a transfer function of an entire system of the heat treatment instrument, based on a heat treatment temperature of the heat furnace of the heat treatment instrument, obtaining a transfer function of the heat furnace on the basis of the transfer function of the entire system and the temperature control parameters, and obtaining temperature control parameters to be adopted in actual processing, based on a target transfer function of the entire system of the heat treatment instrument and the transfer function of the heat furnace.
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