发明名称 |
Ceramic resistor and electrostatic chuck having an aluminum nitride crystal phase |
摘要 |
A ceramic resistor comprising chiefly an aluminum nitride, and an electrostatic chuck using the ceramic resistor as a resistor layer. The ceramic resistor comprises chiefly an aluminum nitride crystal phase, and is doped with at least one kind of atoms selected from the group consisting of elements of the Groups 2b, 4b and 6b of periodic table, and exhibits a volume resistivity of not larger than 1014 OMEGA -cm at 25 DEG C.
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申请公布号 |
US5777543(A) |
申请公布日期 |
1998.07.07 |
申请号 |
US19970841605 |
申请日期 |
1997.04.30 |
申请人 |
KYOCERA CORPORATION |
发明人 |
AIDA, HIROSHI;MIKAMI, KAZUHIKO;KITAZAWA, KENJI |
分类号 |
H01C1/012;H01C7/00;H01C17/08;H01L21/683;(IPC1-7):H01C1/012 |
主分类号 |
H01C1/012 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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