发明名称 Process for the vapor phase synthesis of diamond and highly crystalline diamond
摘要 High quality diamond excellent in crystalline property as well as transparency, can be synthesized at a high growth speed by a process which comprises using, as a raw material gas, a mixed gas of hydrogen gas A, an inert gas B, a carbon atom-containing gas C and an oxygen atom-containing inorganic gas D in such a proportion as satisfying the following relationship by mole ratio: 0.001</=B/(A+B+C+D)</=0.95 0.001</=C/(A+B+C+D)</=0.1 0.0005</=D/C</=10 except that the carbon atom-containing gas C and the oxygen atom-containing inorganic gas D, cannot simultaneously be the same gas feeding the mixed gas into a reactor in which plasma is then formed by applying a DC or AC electric field at a pressure of 10 to 760 torr and thereby depositing and forming diamond on a substrate arranged in the reactor.
申请公布号 US5776552(A) 申请公布日期 1998.07.07
申请号 US19950401291 申请日期 1995.03.09
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 TANABE, KEIICHIRO;FUJIMORI, NAOJI
分类号 C30B29/04;C23C16/27;C30B25/10;(IPC1-7):H05H1/24 主分类号 C30B29/04
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