| 摘要 |
PROBLEM TO BE SOLVED: To provide a method which realizes simplification of operation for setting orientation of a single crystal ingot to reduce the operating labor and to shorten the operating time and also realizes mechanization/automation of the setting operation and an improvement in production efficiency of the single crystal ingot. SOLUTION: In this method, inclination of the normal to a crystal surface from the central axis of a single crystal is measured with respect to the direction of the X axis that orthogonally intersects the central axis, and the direction of the Y axis that orthogonally intersects both the central axis and the X axis. The inclination (xo) in the direction of the X axis and the inclination (y deg.) in the direction of the Y axis are determined and the setting angle valuesθ1 andθ2 are calculated by the formulaθ1 =tan<-1> (tany deg./tanx deg.) and the formulaθ2 =tan<-1> (tany deg./sinθ1 ) respectively. Then, the single crystal ingot is rotated by the calculated angle valueθ1 with the central axis of the ingot as the center to perform the positioning in the circumferential direction and further, rotated by the calculated angle valueθ2 in the direction of the X axis to perform the positioning in the axial direction, to perform the objective orientation setting so that the normal of the crystal surface is consistent with a reference lien based on the central axis of the single crystal ingot.
|
