发明名称 |
Vacuum pump filter for use in a semiconductor system |
摘要 |
A vacuum pump filter for filtering debris from a semiconductor system is disclosed. The vacuum pump filter includes an inlet port for connecting to a chamber. A first filter holder is connected to the inlet port for filtering large debris. A second filter holder for filtering middle debris is connected to the first filter holder. A third filter holder is connected to the second filter holder for filtering small debris. A outlet port is connected to the third filter holder via a terminal. The other terminal of the outlet port is connected to a pump system.
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申请公布号 |
US5776216(A) |
申请公布日期 |
1998.07.07 |
申请号 |
US19970783477 |
申请日期 |
1997.01.14 |
申请人 |
VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION |
发明人 |
YANG, VINCE W. H. |
分类号 |
B01D46/00;B01D46/12;(IPC1-7):B01D46/00 |
主分类号 |
B01D46/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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