| 摘要 |
<p>An electrode array for field cages, specially in microsystems, comprising multiple electrodes in which each terminal area can be subjected to an electric potential via a supply line area. The terminal area is designed to form a respective field cage and inhomogenous shielding fields outside the field cage. The supply line area has a strip-like form to reduce thermal convection, the width of said strip-like form being substantially smaller than the characteristic dimensions of the terminal area.</p> |
