Ultrasonic mask cleaning device with a horn ultrasonic oscillator

摘要

The device has a cleaning bath (20) contg. a cleaning sol., a transport suspension device (50) for arranging a mask to be cleaned in the bath by holding the mask and a horn ultrasonic oscillator arranged in the cleaning bath with an oscillation generator (31), an oscillation amplifier (32) and a horn (33) for generating an ultrasonic wave on receiving the amplified oscillations. The device is arranged so as to perform line-by-line scanning of the surface of the mask with the end of the horn.