Wafer carrier with support and/or conveyor for wet cleaning system for semiconductors

摘要

The carrier (30) has a recess (32) into which the wafer is inserted with its lower section supported. The carrier is coupled to an actuating member by a coupling rod (33). At least two holding bars have also recesses for holding the wafer edges and to hold the wafer on the top side. A second coupling rod links the holding bars to the actuating member. Preferably a coupling plate is located between the first coupling rod and the carrier, and a second coupling plate is fitted between the second coupling rod and the holding bars. Another plate links the two coupling rods.