Stator plate for planar hybrid stepper motor

摘要

A stator plate for a planar hybrid stepping motor has a support structure located between two almost parallel flat cover plates. The support structure contains at least one closed hollow space divided into chambers with at least one pneumatic connection. At least the lower cover plate (1) has holes or recesses of small cross-section through which the individual chambers (5) are connected pneumatically with the surroundings. The chambers of one hollow space are linked together through openings or holes and the individual cross-section of the openings or holes is small in relation to the surface area of the individual chambers.