| 摘要 |
<p>A positioning device (3, 121, 141) with a base (67) and a displaceable unit (5) which is displaceable relative to the base parallel to an X-direction and parallel to a Y-direction by means of an X-actuator (45, 47, 123, 125) and a Y-actuator (49, 127). The X-actuator and the Y-actuator each has a first part (51, 53, 129, 131; 59, 137) which is coupled to the displaceable unit, seen parallel to the X-direction and Y-direction, respectively, and a second part (55, 57, 133, 135; 61, 139) which is coupled to a common balancing unit (43), seen parallel to the X-direction and the Y-direction, respectively, which balancing unit is displaceably guided parallel to the X-direction and to the Y-direction along a guide (69) which extends parallel to the X-direction and the Y-direction and which is fastened to the base. During operation the first parts of the X-actuator and the Y-actuator exert on the second parts reaction forces which are directed parallel to the X-direction and to the Y-direction, respectively, whereby the common balancing unit is displaced parallel to the X-direction and the Y-direction, respectively. It is prevented thereby that the reaction forces are transmitted into the base, so that mechanical vibrations of the base are reduced. In a special embodiment, the balancing unit comprises a support body (43) which comprises a surface (41) which extends parallel to the X-direction and the Y-direction and along which the displaceable unit is guided. The positioning device (3, 121, 141) can be used for the displacement and positioning of a substrate holder (5) in a lithographic device for the manufacture of semiconductor substrates.</p> |
