发明名称 Workpieces preheating for vacuum coating
摘要 The method concerns preheating of workpieces for vacuum coating, according to which the workpiece (1) is brought into vacuum and is heated to a coating temperature by means of electron beams. The workpiece is imaginarily divided into sections (2-4) whose surface/mass ratios differ from the surface/mass ratio of at least one adjacent section (2-4). At least one electron beam (5) is deflected over these sections with corresponding deflection patterns, appropriate irradiation durations and power distributions in such a way that no irreversible structural changes take place in the material of the workpiece
申请公布号 DE19703338(A1) 申请公布日期 1998.07.02
申请号 DE19971003338 申请日期 1997.01.30
申请人 VON ARDENNE ANLAGENTECHNIK GMBH, 01324 DRESDEN, DE 发明人 WENZEL, BERND-DIETER, DIPL.-PHYS., 01326 DRESDEN, DE;REINHOLD, EKKEHART, DIPL.-PHYS., 01465 LANGEBRUECK, DE;SENF, JOACHIM, DIPL.-ING., 01277 DRESDEN, DE;DEUS, CARSTEN, DIPL.-PHYS., 01309 DRESDEN, DE
分类号 C23C14/02;C23C16/02;(IPC1-7):C23C14/02;C23C14/04 主分类号 C23C14/02
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