发明名称 Verfahren zur Herstellung einer keramischen Beschichtung und eine homogene flüssige Zusammensetzung hierfür
摘要 The present invention relates to the application of ceramic coatings on substrates. The method comprises applying a preceramic coating comprising hydrogen silsesquioxane resin, a material containing Si-Si bonds which forms volatile SiH compounds, and a catalyst followed by pyrolyzing the preceramic coating in an inert atmosphere. The novel ceramic coatings formed by the process of this invention are especially valuable on electronic devices.
申请公布号 DE4212999(C2) 申请公布日期 1998.07.02
申请号 DE19924212999 申请日期 1992.04.21
申请人 DOW CORNING CORP., MIDLAND, MICH., US 发明人 HALUSKA, LOREN ANDREW, MIDLAND, MICH., US;MICHAEL, KEITH WINTON, MIDLAND, MICH., US
分类号 B05D3/06;B05D7/24;C04B41/87;C08G77/12;C08G77/48;C09D183/04;C09D183/05;C09D183/14;H01B3/30;H01L21/312;H01L21/316;(IPC1-7):B05D3/02;H01L21/56;H01L23/29 主分类号 B05D3/06
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