Verfahren zur Erzeugung mikroskopischer Strukturen,申请号DE19916028994T-传众专利搜索

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发明名称	Verfahren zur Erzeugung mikroskopischer Strukturen
摘要
申请公布号	DE69128994(T2)	申请公布日期	1998.07.02
申请号	DE19916028994T	申请日期	1991.09.10
申请人	MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., KADOMA, OSAKA, JP	发明人	SHIBAIKE, NARITO, HIRAKATA-SHI, OSAKA-FU 573, JP;NAGASHIMA, MICHIYOSHI, IKOMA-SHI, NARA-KEN 630-01, JP;UENO, FUMIAKI, HIRAKATA-SHI, OSAKA-FU 573, JP;KISHI, TOSHINORI, OSAKA-SHI, OSAKA-FU 532, JP
分类号	C23F4/00;H01J37/305;H01L21/027;H01L21/302;H01L21/3065;(IPC1-7):H01J37/305	主分类号	C23F4/00
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