| 摘要 |
<p>A pivotal shaft (130) is provided along the Z-axis on a semiconductor substrate (100), whose upper surface extends along the XY-plane, to fit a rotor (200) consisting of dielectric material. The rotor is supported by the pivotal shaft so that it can be inclined and can be rotated. The peripheral portion of the rotor constitutes weight bodies (211, 212), and stators (111, 115) consisting of conductive material are disposed at the periphery thereof. When a.c. voltages of predetermined period are delivered to the stators, the rotor is rotated while floating in accordance with the principle of the induction motor. When angular velocity omega x about the X-axis is applied to the substrate 100, Corioli's force Fcz in the Z-axis positive direction is applied to the weight body (211) passing through the X-axis with velocity component in the Y-axis positive direction so that it becomes away from the substrate. Corioli's force -Fcz in the Z-axis negative direction is applied to the weight body (212) passing through the X-axis with velocity component in the Y-axis negative direction so that it becomes close the substrate. Capacitance elements C1, C2 are formed by fixed electrodes (141AB, 142AB) on the substrate and movement electrodes (231, 232) on the rotor. Difference between electrostatic capacitance values of both the capacitance elements is obtained to detect magnitude of applied Corioli's force. The magnitude of the detected Corioli's force is outputted as a value of angular velocity omega x about the X-axis. Even under the environment where acceleration is applied, the acceleration component is canceled by obtaining difference. <IMAGE></p> |
