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发明名称
Method for etching tantalum oxide layer
摘要
申请公布号
GB9809657(D0)
申请公布日期
1998.07.01
申请号
GB19980009657
申请日期
1998.05.06
申请人
UNITED MICROELECTRONICS CORPORATION
发明人
分类号
H01L21/02;H01L21/311;H01L21/8242
主分类号
H01L21/02
代理机构
代理人
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地址
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