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发明名称
摘要
申请公布号	JP2575935(Y2)	申请公布日期	1998.07.02
申请号	JP19920015898U	申请日期	1992.03.26
申请人		发明人
分类号	C23F4/00;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):C23F4/00;H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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