| 摘要 |
PROBLEM TO BE SOLVED: To quickly damp the vibration of a planar linear motor when the motor is positioned by adding speed components detected against the input waveform having the highest linearity of input waveforms to each phase in a plurality of sections to a current command signal so that the components can act in the opposite direction to the advancing direction of the motor. SOLUTION: An acceleration sensor 14 generates acceleration signals which indicate the acceleration resulting from the movement of a motor 2 and inputs the signals to an integrator 13. The integrator 13 finds speed signals indicating the speed of the the motor 2 by integrating the acceleration indicated by the acceleration signals and outputs the speed signals to a waveform distributor 11. The distributor 11 adds the speed signal which acts in the opposite direction of the advancing direction of the motor 2 to a current command signal and outputs the command signal to a motor driving circuit 12. Therefore, the motor 2 can be set quickly, because the vibration of the motor 2 can be damped quickly at the time of positioning the motor 2. |
