ACCELERATION MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide an acceleration measuring instrument which can be manufactured at a low cost and has accurate dimensions. SOLUTION: The acceleration measuring instrument includes at least two separate sensors, which are provided on a common substrate 10 and respectively have main sensitivity axes 12a and 12c and cantilever paddle pieces 3a and 3c which are respectively coupled with flexural beams 4a and 4c as earthquake masses and have centers of gravity Sa and Sc. The beams 4a and 4c have means which measure the deflection of the earthquake masses and are provided in parallel with the surface of the substrate 10. The main sensitivity axes 12a and 12c of the sensors are inclined by a phase angleαto normal lines 14a and 14c of the surface of the substrate 10.