发明名称 Organic silicon compound, resist, thermal polymerization composition and photopolymerization composition
摘要 Disclosed are an organic silicon compound having a repeating unit represented by general formula (I) shown below, a resist, a thermal polymerization composition and a photopolymerization composition containing the organic silicon compound, <IMAGE>group, R2 is an hydrogen atom, a substituted or unsubstituted alkyl group having 1 to 24 carbon atoms, a substituted or unsubstituted aryl group having 1 to 24 carbon atoms, or a substituted or unsubstituted aralkyl having 7 to 24 carbon atoms, R3 is a substituted or unsubstituted alkyl group having 1 to 24 carbon atoms, a substituted or unsubstituted aryl group having 6 to 24 carbon atoms, a substituted or unsubstituted aralkyl group having 7 to 24 carbon atoms or an alkoxyl group, and k represents an integer from 0 to 4.
申请公布号 US5773192(A) 申请公布日期 1998.06.30
申请号 US19970794587 申请日期 1997.02.03
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MURAI, SHINJI;NAKANO, YOSHIHIKO;UCHIDA, KEN;HAYASE, SHUJI
分类号 B41M5/36;C07F7/08;C08F4/00;C08G77/48;C08G77/60;C08L83/02;C08L83/16;G03F7/004;G03F7/027;G03F7/029;G03F7/075;(IPC1-7):G03F7/004;G03F7/023;G08G77/00 主分类号 B41M5/36
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