| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the need for an optical integrator and to improve efficiency with a simple constitution in the exposure in manufacturing a semiconductor. SOLUTION: The luminous flux from a light source part, which is reflected from the first concave mirror, becomes the parallel magnetic flux at a meridional plane, and it becomes the diverging luminous flux in a sagittal plane. The luminous flux, which is reflected from the second concave mirror, is converged at a focal point F2 of the meridional cross section (parabola) of the second concave mirror and converted to a position T on the rotation reference axis of the second concave mirror in the sagittal plane. When the distance from the light source to the concave mirror is set (a), the distance from the second concave mirror to the converged point in the sagittal plane of the rotation reference axis is set (b), and the distance from the second concave mirror to the converged point in the meridional plane is set (c), the relationship of 1/a+1/b=1/c is estabtished. |
