METHOD AND DEVICE FOR ETCHING AL-CU ALLOY FILM,申请号JP19960335896-传众专利搜索

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发明名称	METHOD AND DEVICE FOR ETCHING AL-CU ALLOY FILM
摘要
申请公布号	JPH10177990(A)	申请公布日期	1998.06.30
申请号	JP19960335896	申请日期	1996.12.16
申请人	SONY CORP	发明人	YAMADA HIROSHI
分类号	C23F4/00;H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/306;H01L21/321	主分类号	C23F4/00
代理机构		代理人
主权项
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