Vacuum oven chamber for making laminated integrated circuit devices

摘要

An oven for making laminated integrated circuit cubes includes an oven chamber with at least one access opening. A closure member for the access opening is capable of hermetically sealing the chamber. A hermetic connection is provided for supplying power to within the chamber. Structure permits the withdrawal of air and other gases from within the chamber. Hermetic structure permits the application of a press force to a workpiece within the chamber from an actuator outside the chamber. Hermetic temperature sensing devices measure the temperature of a workpiece within the chamber.