| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave element with a high degree of freedom of combination of an electromechanical coupling coefficient and a temperature dependency, especially with a high electromechanical coupling coefficient and a small temperature dependency. SOLUTION: Flat processing, mirror surface processing, cleaning processing, hydrophilic processing are applied to a single crystal piezoelectric substrate 10 and a single crystal piezoelectric thin plate 20, they are overlapped and heat-treated, then they are directly adhered and laminated, and a interdigital electrode 30 to stimulate a Rayleigh surface acoustic wave is provided onto the single crystal piezoelectric substrate 10 or the single crystal piezoelectric thin plate 20. Let a plate thickness of the single crystal piezoelectric thin plate 20 be H and a wavelength of the stimulated surface acoustic wave be A, then a relation of H/λ<0.5 is in existence.
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