发明名称 In-situ technique for cleaving crystals
摘要 The specification describes techniques for cleaving crystal bodies, e.g. semiconductor laser bars, using thermostatic cleaving tools. Use of such tools allows the cleaving process to occur in an ultra high vacuum chamber without the use of mechanical devices activated from the exterior of the chamber. Cleaving occurs automatically and controllably by locally heating the cleaving tools, thereby deflecting the thermostatic element against the laser bar and causing fracture.
申请公布号 US5773318(A) 申请公布日期 1998.06.30
申请号 US19960723660 申请日期 1996.10.30
申请人 LUCENT TECHNOLOGIES INC. 发明人 CHAND, NARESH;HAMM, ROBERT ALAN
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
代理机构 代理人
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