发明名称 |
In-situ technique for cleaving crystals |
摘要 |
The specification describes techniques for cleaving crystal bodies, e.g. semiconductor laser bars, using thermostatic cleaving tools. Use of such tools allows the cleaving process to occur in an ultra high vacuum chamber without the use of mechanical devices activated from the exterior of the chamber. Cleaving occurs automatically and controllably by locally heating the cleaving tools, thereby deflecting the thermostatic element against the laser bar and causing fracture.
|
申请公布号 |
US5773318(A) |
申请公布日期 |
1998.06.30 |
申请号 |
US19960723660 |
申请日期 |
1996.10.30 |
申请人 |
LUCENT TECHNOLOGIES INC. |
发明人 |
CHAND, NARESH;HAMM, ROBERT ALAN |
分类号 |
H01L21/304;(IPC1-7):H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|